From jperez at snf.stanford.edu Thu Jul 3 07:11:45 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 Jul 2008 07:11:45 -0700 Subject: Comment sts SNF 2008-06-27 16:43:23: is in the clean Message-ID: Clean Completed. From pnataraj at snf.stanford.edu Thu Jul 3 13:32:40 2008 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Thu, 3 Jul 2008 13:32:40 -0700 Subject: Comment sts SNF 2008-07-03 13:32:39: clean started Message-ID: From chen0622 at snf.stanford.edu Fri Jul 4 10:38:39 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 4 Jul 2008 10:38:39 -0700 Subject: Problem sts SNF 2008-07-04 10:38:38: could not disable after finishing the work Message-ID: From shott at snf.stanford.edu Fri Jul 4 11:20:56 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 4 Jul 2008 11:20:56 -0700 Subject: Problem sts SNF 2008-07-04 10:38:38: could not disable after finishing the work Message-ID: This (and the ALD) interlocks were disconnected yesterday when Jim Haydon disconnected and removed the CPD. Because the sts and ald interlockes are daisy chained through the CPD, I've now plugged in the sts (and, as a result) the ALD) interlock directly into the jack in the utility strip. When the CPD returns, it's interlock will need to be plugged into the jack in the utility strip and the sts/ald interlock wires will, once again, need to be daisy chained through it. Thanks, John From xhlim at snf.stanford.edu Sat Jul 5 11:41:53 2008 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Sat, 5 Jul 2008 11:41:53 -0700 Subject: Comment sts SNF 2008-07-05 11:41:53: clean started at 11.40 am Message-ID: From xhlim at snf.stanford.edu Sat Jul 5 11:42:10 2008 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Sat, 5 Jul 2008 11:42:10 -0700 Subject: Comment sts SNF 2008-07-05 11:42:10: clean started at 11.45 am Message-ID: From jperez at snf.stanford.edu Mon Jul 7 07:11:40 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jul 2008 07:11:40 -0700 Subject: Comment sts SNF 2008-07-03 13:32:39: clean started Message-ID: completed. From jperez at snf.stanford.edu Mon Jul 7 09:48:33 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jul 2008 09:48:33 -0700 Subject: Comment sts SNF 2008-07-05 11:41:53: clean started at 11.40 am Message-ID: This clean was completed From jperez at snf.stanford.edu Mon Jul 7 09:48:51 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jul 2008 09:48:51 -0700 Subject: Comment sts SNF 2008-07-05 11:42:10: clean started at 11.45 am Message-ID: This clean was completed. From tdo at snf.stanford.edu Thu Jul 10 14:55:43 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:55:43 -0700 Subject: Problem sts SNF 2008-07-10 14:55:42: High freq RF power not striking all the time Message-ID: During the nitride deposition process, I noticed the high freq RF plasma did not strike at least 5 times during the 16 mins process. From tdo at snf.stanford.edu Thu Jul 10 14:55:54 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 10 Jul 2008 14:55:54 -0700 Subject: Comment sts SNF 2008-07-10 14:55:54: clean cycle Message-ID: in clean cycle! From jperez at snf.stanford.edu Fri Jul 11 12:16:57 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Jul 2008 12:16:57 -0700 Subject: Problem sts SNF 2008-07-11 12:16:57: Nitride depositions has a problem with Message-ID: High Frequency not always striking a plasma. Jim Haydon will work on this problem on Monday. From emyers at snf.stanford.edu Sat Jul 12 18:47:19 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 12 Jul 2008 18:47:19 -0700 Subject: Shutdown sts SNF 2008-07-12 18:47:18: Burn Box Fault Message-ID: The burn box is down due to the power glitch. From jhaydon at snf.stanford.edu Mon Jul 14 07:11:44 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 14 Jul 2008 07:11:44 -0700 Subject: Shutdown sts SNF 2008-07-12 18:47:18: Burn Box Fault Message-ID: burn box back up From jperez at snf.stanford.edu Mon Jul 14 07:33:22 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 14 Jul 2008 07:33:22 -0700 Subject: Comment sts SNF 2008-07-10 14:55:54: clean cycle Message-ID: completed From rcordova at snf.stanford.edu Thu Jul 17 16:39:51 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 17 Jul 2008 16:39:51 -0700 Subject: Comment sts SNF 2008-07-17 16:39:50: System is at 4.5 microns, Time for clean!!!!! Message-ID: From jperez at snf.stanford.edu Mon Jul 21 15:10:26 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 21 Jul 2008 15:10:26 -0700 Subject: Comment sts SNF 2008-07-17 16:39:50: System is at 4.5 microns, Time for clean!!!!! Message-ID: Was completed From jperez at snf.stanford.edu Mon Jul 21 15:11:46 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 21 Jul 2008 15:11:46 -0700 Subject: Comment sts SNF 2008-07-21 15:11:45: Jim Haydon worked on the grounding strap. Message-ID: Until I can check the system out, please run your own test. From jperez at snf.stanford.edu Fri Jul 25 13:57:32 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 Jul 2008 13:57:32 -0700 Subject: Comment sts SNF 2008-07-21 15:11:45: Jim Haydon worked on the grounding strap. Message-ID: Ran two test. 1 High Freq. oxide and was good, dep. rate was 314A/min. 2nd test was nitride. dep. rate was 97A/min. High Freq. is still sometimes not striking plasma. I ran for 10 minutes and only once plasma didn't strike. From pnataraj at snf.stanford.edu Mon Jul 28 00:10:45 2008 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Mon, 28 Jul 2008 00:10:45 -0700 Subject: Comment sts SNF 2008-07-28 00:10:45: in clean Message-ID: From jperez at snf.stanford.edu Thu Jul 31 12:14:30 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 Jul 2008 12:14:30 -0700 Subject: Problem sts SNF 2008-07-31 12:14:30: Ran 3 oxide tests today using Hi Freq Message-ID: Deposition rate has dropped over one hundred angstroms. Refractive index ok. Average deposition is ~245A/min. From jperez at snf.stanford.edu Thu Jul 31 12:14:57 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 Jul 2008 12:14:57 -0700 Subject: Comment sts SNF 2008-07-28 00:10:45: in clean Message-ID: completed.