From rcordova at snf.stanford.edu Tue Jun 17 15:15:43 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 17 Jun 2008 15:15:43 -0700 Subject: Comment sts SNF 2008-06-17 15:15:42: System in Clean Message-ID: From rcordova at snf.stanford.edu Sun Jun 22 10:54:04 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sun, 22 Jun 2008 10:54:04 -0700 Subject: Comment sts SNF 2008-06-22 10:54:04: System is in clean Message-ID: From jperez at snf.stanford.edu Mon Jun 23 07:15:10 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Jun 2008 07:15:10 -0700 Subject: Comment sts SNF 2008-06-17 15:15:42: System in Clean Message-ID: This clean was completed. From jperez at snf.stanford.edu Mon Jun 23 11:49:10 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Jun 2008 11:49:10 -0700 Subject: Comment sts SNF 2008-06-22 10:54:04: System is in clean Message-ID: Clean completed! From rcordova at snf.stanford.edu Tue Jun 24 15:32:59 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 24 Jun 2008 15:32:59 -0700 Subject: Comment sts SNF 2008-06-24 15:32:58: Back to clean cycle!!! Message-ID: Started 6/24 @15:30 From ccwan at snf.stanford.edu Tue Jun 24 22:07:04 2008 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Tue, 24 Jun 2008 22:07:04 -0700 Subject: Comment sts SNF 2008-06-24 22:07:03: Process doesn't count down Message-ID: Reboot machine and now it works ok. From jperez at snf.stanford.edu Thu Jun 26 07:11:13 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 Jun 2008 07:11:13 -0700 Subject: Comment sts SNF 2008-06-24 22:07:03: Process doesn't count down Message-ID: OK to use From jperez at snf.stanford.edu Thu Jun 26 07:11:27 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 Jun 2008 07:11:27 -0700 Subject: Comment sts SNF 2008-06-24 15:32:58: Back to clean cycle!!! Message-ID: Clean complete From jperez at snf.stanford.edu Thu Jun 26 10:27:42 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 Jun 2008 10:27:42 -0700 Subject: Shutdown sts SNF 2008-06-26 10:27:42: 2% bottle Change, Test came out bad. Message-ID: Thickness low, 540 angstrom (target 1000A). Index of fraction was 1.56 (target 1.47). From jperez at snf.stanford.edu Thu Jun 26 14:39:56 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 Jun 2008 14:39:56 -0700 Subject: Shutdown sts SNF 2008-06-26 10:27:42: 2% bottle Change, Test came out bad. Message-ID: Purged sih4 line, coated chamber with same recipe that I test with. TW came out beautifully. All nine measures were the same on Woollam. 979. Index was back to 1.47. Dep rate is 391 angstroms per minute. OK to use. From pnataraj at snf.stanford.edu Fri Jun 27 16:43:23 2008 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Fri, 27 Jun 2008 16:43:23 -0700 Subject: Comment sts SNF 2008-06-27 16:43:23: is in the clean Message-ID: