Shutdown sts SNF 2008-06-26 10:27:42: 2% bottle Change, Test came out bad.

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jun 26 14:39:56 PDT 2008


Purged sih4 line, coated chamber with same recipe that I
test with. TW came out beautifully. All nine measures were 
the same on Woollam. 979. Index was back to 1.47. Dep rate 
is 391 angstroms per minute. OK to use.




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