From jhaydon at snf.stanford.edu Wed Mar 5 10:27:34 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 5 Mar 2008 10:27:34 -0800 Subject: Shutdown sts SNF 2008-03-05 10:27:33: chamber leak and computer problems Message-ID: From jperez at snf.stanford.edu Thu Mar 6 08:08:37 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 6 Mar 2008 08:08:37 -0800 Subject: Shutdown sts SNF 2008-03-05 10:27:33: chamber leak and computer problems Message-ID: Re-zeroed the pressure sensor. Run gas flows and checked chamber pressure. System is OK to use. Put the system down for a clean, due to chamber cooled down. From druist at snf.stanford.edu Fri Mar 7 14:31:28 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Fri, 7 Mar 2008 14:31:28 -0800 Subject: Comment sts SNF 2008-03-07 14:31:28: clean cycle Message-ID: will finish by 7:30 PM From rcordova at snf.stanford.edu Sat Mar 8 11:07:41 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sat, 8 Mar 2008 11:07:41 -0800 Subject: Problem sts SNF 2008-03-08 11:07:40: Process Tolerance Error: Message-ID: 30 seconds into my oxide dep, lost plasma and rec'd Process Tolerance Error: restarted, same thing. plasma slowly dies out. Rebooted, tried to start process one more time. Again, 30 sec into dep, plasma died out. From rcordova at snf.stanford.edu Sat Mar 8 13:00:52 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sat, 8 Mar 2008 13:00:52 -0800 Subject: Problem sts SNF 2008-03-08 13:00:52: Addendum to above problem Message-ID: Just a note: the process tolerance error happened during my 3,000a recipe. I tried a test on my 400a recipe and had no errors. Not sure if it is recipe related, and or just the short time of 45 sec. does not allow time for error to show. Just an FYI From sdogbe at snf.stanford.edu Mon Mar 10 08:49:53 2008 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Mon, 10 Mar 2008 08:49:53 -0700 Subject: Comment sts SNF 2008-03-10 08:49:52: Pumpdown time exceeded Message-ID: System unable to pumpdown or go into standby mode. From jhaydon at snf.stanford.edu Mon Mar 10 09:41:51 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 10 Mar 2008 09:41:51 -0700 Subject: Comment sts SNF 2008-03-10 08:49:52: Pumpdown time exceeded Message-ID: valve was left open From jperez at snf.stanford.edu Mon Mar 10 14:06:21 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Mar 2008 14:06:21 -0700 Subject: Problem sts SNF 2008-03-08 11:07:40: Process Tolerance Error: Message-ID: I can't say what happen, but I ran the same recipe for the full process time (8minutes) and no errors. No plasma interruptions. All flows stable within their tolerances. From jperez at snf.stanford.edu Mon Mar 10 14:06:43 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Mar 2008 14:06:43 -0700 Subject: Problem sts SNF 2008-03-08 13:00:52: Addendum to above problem Message-ID: I can't say what happen, but I ran the same recipe for the full process time (8minutes) and no errors. No plasma interruptions. All flows stable within their tolerances. From jperez at snf.stanford.edu Mon Mar 10 14:07:22 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Mar 2008 14:07:22 -0700 Subject: Comment sts SNF 2008-03-07 14:31:28: clean cycle Message-ID: completed on 3/07/08 From calarrudo at snf.stanford.edu Mon Mar 24 16:08:06 2008 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 24 Mar 2008 16:08:06 -0700 Subject: Comment sts SNF 2008-03-24 16:08:05: STS started a clean cycle Message-ID: Platen contaminated by previous user. Stare ted the ETCHBACK @ 4:03 pm From jperez at snf.stanford.edu Fri Mar 28 07:28:47 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 28 Mar 2008 07:28:47 -0700 Subject: Comment sts SNF 2008-03-24 16:08:05: STS started a clean cycle Message-ID: clean completed