Problem sts SNF 2008-03-08 11:07:40: Process Tolerance Error:

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Mar 10 14:06:21 PDT 2008


I can't say what happen, but I ran the same recipe for the
full process time (8minutes) and no errors. No plasma
interruptions. All flows stable within their tolerances.




More information about the sts-pcs mailing list