Problem sts SNF 2008-03-08 13:00:52: Addendum to above problem

jperez at jperez at
Mon Mar 10 14:06:43 PDT 2008

I can't say what happen, but I ran the same recipe for the
full process time (8minutes) and no errors. No plasma
interruptions. All flows stable within their tolerances.

More information about the sts-pcs mailing list