From rcordova at snf.stanford.edu Thu May 15 12:54:34 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 15 May 2008 12:54:34 -0700 Subject: Comment sts SNF 2008-05-15 12:54:34: System is going into cleat @ 4.26 micron Message-ID: Window is very dirty!!!! From rcordova at snf.stanford.edu Thu May 15 16:33:35 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 15 May 2008 16:33:35 -0700 Subject: Problem sts SNF 2008-05-15 16:33:35: Gas flow error: Silane 2% Message-ID: During clean cycle. runnign oxpredep and rec'd this error: Gas flow error (silane 2%) f2 reume does not restart it. I left a message for J. Haydon. all maint staff is gone. From jhaydon at snf.stanford.edu Fri May 16 06:51:31 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 16 May 2008 06:51:31 -0700 Subject: Problem sts SNF 2008-05-15 16:33:35: Gas flow error: Silane 2% Message-ID: siane bottle was shut down because of false gas alarm in the gas vault From jimkruger at snf.stanford.edu Mon May 19 18:04:27 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 19 May 2008 18:04:27 -0700 Subject: Comment sts SNF 2008-05-19 18:04:27: STS clean: help required to finish tonight Message-ID: "druist" was called suddendly away so left STS in clean. Anyone who could help finish the clean cycle tonight would be a model labuser, deserving the thanks of all the STS community. "pnataraj" has a reservation for 2030 tonight. jim From rcordova at snf.stanford.edu Wed May 21 15:26:58 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Wed, 21 May 2008 15:26:58 -0700 Subject: Comment sts SNF 2008-05-21 15:26:58: System is back in clean again!!! Message-ID: Started at 3:30 pm From chen0622 at snf.stanford.edu Wed May 21 17:24:19 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Wed, 21 May 2008 17:24:19 -0700 Subject: Problem sts SNF 2008-05-21 17:24:18: RF power tolerance error Message-ID: During the cleaning cycle, Etchbak3, the error message "RF power tolerance error" coming up every few miniutes, I need to press F2 to resume. From jperez at snf.stanford.edu Thu May 22 07:07:36 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 May 2008 07:07:36 -0700 Subject: Comment sts SNF 2008-05-19 18:04:27: STS clean: help required to finish tonight Message-ID: Clean completed From jperez at snf.stanford.edu Thu May 22 07:08:13 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 May 2008 07:08:13 -0700 Subject: Comment sts SNF 2008-05-15 12:54:34: System is going into cleat @ 4.26 micron Message-ID: clean cycle done From jperez at snf.stanford.edu Tue May 27 08:24:19 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 May 2008 08:24:19 -0700 Subject: Comment sts SNF 2008-05-21 15:26:58: System is back in clean again!!! Message-ID: Completed clean.