From jperez at snf.stanford.edu Thu Nov 6 11:43:42 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 6 Nov 2008 11:43:42 -0800 Subject: Comment sts SNF 2008-11-06 11:43:42: Ran Nitride and Oxide test Message-ID: Oxide thickness is dropping. It was 377A two weeks ago and now 365A/min. Nitride test wafers (2) Loaded Front and Back were the same, 1066A and 1065 A. Dep. rate is 106/ min. Jim Haydon found the ground strap starting to rip and he is replacing it now. From jperez at snf.stanford.edu Thu Nov 6 14:36:46 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 6 Nov 2008 14:36:46 -0800 Subject: Problem sts SNF 2008-11-06 14:36:46: Jim Haydon replaced the grounding strap. Message-ID: I ran a oxide test and the deposition rate was even lower, 353.5A/ min. Please test before depositing. Nitride is DEP is good. From xhlim at snf.stanford.edu Fri Nov 7 14:57:38 2008 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Fri, 7 Nov 2008 14:57:38 -0800 Subject: Comment sts SNF 2008-11-07 14:57:37: very slow pumpdown time Message-ID: Several times, I got the message "pumpdown time exceeded". From junjun at snf.stanford.edu Sun Nov 9 12:30:46 2008 From: junjun at snf.stanford.edu (junjun at snf.stanford.edu) Date: Sun, 9 Nov 2008 12:30:46 -0800 Subject: Problem sts SNF 2008-11-09 12:30:45: computer communication failure Message-ID: no keyboard was found From jperez at snf.stanford.edu Mon Nov 10 12:03:55 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Nov 2008 12:03:55 -0800 Subject: Problem sts SNF 2008-11-09 12:30:45: computer communication failure Message-ID: STS PECVD needs to be enabled before you use the key board to vent. From jperez at snf.stanford.edu Mon Nov 10 13:21:25 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Nov 2008 13:21:25 -0800 Subject: Comment sts SNF 2008-11-07 14:57:37: very slow pumpdown time Message-ID: Two things that cause this, 1) the nitrogen MFC flow meter is too high or to low . 2) the Argon toggle wasn't off. From jperez at snf.stanford.edu Mon Nov 10 14:58:34 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Nov 2008 14:58:34 -0800 Subject: Comment sts SNF 2008-11-10 14:58:33: Fan to hard drive very loud. Message-ID: From jperez at snf.stanford.edu Thu Nov 13 10:19:01 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 13 Nov 2008 10:19:01 -0800 Subject: Comment sts SNF 2008-11-13 10:19:01: Ran a LFreq. and HFreq. test Message-ID: Dep rate for LF 346 angstroms, 1.473 per Woollam Dep rate for HF 357 angstroms, 1.464 per Woollam Dep. rates slowly dropping! Uniformity is good (<3%) From dgrbovic at snf.stanford.edu Thu Nov 13 10:44:02 2008 From: dgrbovic at snf.stanford.edu (dgrbovic at snf.stanford.edu) Date: Thu, 13 Nov 2008 10:44:02 -0800 Subject: Shutdown sts SNF 2008-11-13 10:44:01: maintenance Message-ID: From jhaydon at snf.stanford.edu Thu Nov 13 15:45:37 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 13 Nov 2008 15:45:37 -0800 Subject: Shutdown sts SNF 2008-11-13 10:44:01: maintenance Message-ID: maintenance completed From jhaydon at snf.stanford.edu Thu Nov 13 15:47:33 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 13 Nov 2008 15:47:33 -0800 Subject: Comment sts SNF 2008-11-10 14:58:33: Fan to hard drive very loud. Message-ID: fan fixed From jperez at snf.stanford.edu Fri Nov 14 09:40:33 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 14 Nov 2008 09:40:33 -0800 Subject: Problem sts SNF 2008-11-06 14:36:46: Jim Haydon replaced the grounding strap. Message-ID: Test results after grounding strap didn't change. Jim adjusted showerhead and replaced / tighten screws and test results improved. From jperez at snf.stanford.edu Fri Nov 14 09:49:18 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 14 Nov 2008 09:49:18 -0800 Subject: Comment sts SNF 2008-11-13 10:19:01: Ran a LFreq. and HFreq. test Message-ID: Test results after Jim adjusted and tighten screws improved Low Frequency dep. rate and uniformity. Improved High Frequency's unifrmity, but not dep. rate. LF DR 387.6 A/min. RI 1.475, Uniformity across the wf.<2% Hf DR 351.3 A/ min. RI 1.467 Uniformity across the wf 1% From jperez at snf.stanford.edu Fri Nov 14 09:57:46 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 14 Nov 2008 09:57:46 -0800 Subject: Comment sts SNF 2008-11-06 11:43:42: Ran Nitride and Oxide test Message-ID: Test results good after showerhead adjustment LF oxide dep. rate 387.6 A/min., Index of refraction 1.475 HF oxide dep. rate 351.3 A/min., Index of refraction 1.467 Uniformity across the wafer on both tests improved. From shott at snf.stanford.edu Sat Nov 22 08:54:58 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 22 Nov 2008 08:54:58 -0800 Subject: Comment sts SNF 2008-11-22 08:54:58: Pump off Saturday am .... Message-ID: I received a report from chen0622 on Saturday morning that sts would not pump down. A trip to the basement showed that the Edwards dry pumping package was not running. I pressed "Start", the pumps turned on, and chen0622 is happy! We should keep an eye on this, however, and look for underlying problems. Thanks, John From ahryciw at snf.stanford.edu Sun Nov 23 18:35:05 2008 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Sun, 23 Nov 2008 18:35:05 -0800 Subject: Comment sts SNF 2008-11-23 18:35:05: Black spot near centre of platen Message-ID: System was found with a dark brown-black spot, approx. 7 mm in diameter, near the centre of the platen. Special cleaning required?