Comment sts SNF 2008-11-06 11:43:42: Ran Nitride and Oxide test

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Nov 6 11:43:42 PST 2008


Oxide thickness is dropping. It was 377A two weeks ago and 
now 365A/min.
Nitride test wafers (2) Loaded Front and Back were the same,
1066A and 1065 A. Dep. rate is 106/ min.
Jim Haydon found the ground strap starting to rip and he is 
replacing it now.




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