Problem sts SNF 2008-11-06 14:36:46: Jim Haydon replaced the grounding strap.

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Nov 6 14:36:46 PST 2008


I ran a oxide test and the deposition rate was even lower,
353.5A/ min. Please test before depositing. Nitride is DEP 
is good.




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