From jhaydon at snf.stanford.edu Thu Oct 2 07:40:11 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 2 Oct 2008 07:40:11 -0700 Subject: Shutdown sts SNF 2008-10-02 07:40:11: new pump stack Message-ID: From jperez at snf.stanford.edu Thu Oct 2 14:14:18 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 2 Oct 2008 14:14:18 -0700 Subject: Shutdown sts SNF 2008-10-02 07:40:11: new pump stack Message-ID: New pump has been installed. System will need a clean and tests ran after Oxide and/or Nitride recipe. From jperez at snf.stanford.edu Thu Oct 2 14:18:41 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 2 Oct 2008 14:18:41 -0700 Subject: Comment sts SNF 2008-09-26 07:36:46: new pump installation Thursday Oct 2 Message-ID: New pump installed, system needs to be cleaned (7 steps). Power was turned off. An oxide and / or nitride test needs to be ran before system is back up for processing. From jperez at snf.stanford.edu Thu Oct 2 14:22:18 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 2 Oct 2008 14:22:18 -0700 Subject: Problem sts SNF 2008-10-02 14:22:17: New pump installed Message-ID: We need to make sure system can operate the same with a smaller pump. Run Clean cycle (7 steps), ran a test. From jperez at snf.stanford.edu Thu Oct 2 15:18:39 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 2 Oct 2008 15:18:39 -0700 Subject: Problem sts SNF 2008-10-02 15:18:38: Temperature higher 350/360 Message-ID: From jperez at snf.stanford.edu Fri Oct 3 11:57:29 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 3 Oct 2008 11:57:29 -0700 Subject: Problem sts SNF 2008-10-02 15:18:38: Temperature higher 350/360 Message-ID: Temperature stable by morning 10/03/08. Ran two test and Temperature behaving. From jperez at snf.stanford.edu Fri Oct 3 14:45:31 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 3 Oct 2008 14:45:31 -0700 Subject: Problem sts SNF 2008-10-02 14:22:17: New pump installed Message-ID: Ran a nitride test after pump change. Dep. rate 95.5A/min and 95A/ min. Index of refraction 1.97 & 1.96. % range across the wafer was 5.5% & 4.6% (2 t.w.s). Saw no changes in parameters during deposition. From jperez at snf.stanford.edu Fri Oct 3 14:47:31 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 3 Oct 2008 14:47:31 -0700 Subject: Problem sts SNF 2008-10-03 14:47:31: Switched 2% silane bottle, from B to A Message-ID: Pressure was 300 to 400 psi. not enough to last through the weekend. From jperez at snf.stanford.edu Fri Oct 3 14:50:47 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 3 Oct 2008 14:50:47 -0700 Subject: Problem sts SNF 2008-10-03 14:47:31: Switched 2% silane bottle, from B to A Message-ID: Ran a oxide test run. Avg. thickness 1858, dep. rate 377A/min. % range across the wafer was 1.76% Refractive index 1.473 PECVD is up, From bilee at snf.stanford.edu Sat Oct 11 01:55:39 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Sat, 11 Oct 2008 01:55:39 -0700 Subject: Problem sts SNF 2008-10-11 01:55:38: pressure tolerence error Message-ID: Pressure Tolerence Error occured at the beginning of 16 hours warm down. From jperez at snf.stanford.edu Mon Oct 13 07:41:37 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 13 Oct 2008 07:41:37 -0700 Subject: Problem sts SNF 2008-10-11 01:55:38: pressure tolerence error Message-ID: The N2 flow meter is either getting bumped or someone is adjusting this flow. The flow setting should be at 1.2.. This flow meter is next to the Argon toggle switch. From chen0622 at snf.stanford.edu Thu Oct 16 17:28:35 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Thu, 16 Oct 2008 17:28:35 -0700 Subject: Problem sts SNF 2008-10-16 17:28:34: system error for gas purge fault Message-ID: System recovered by reboot. From jperez at snf.stanford.edu Fri Oct 17 07:22:20 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 17 Oct 2008 07:22:20 -0700 Subject: Problem sts SNF 2008-10-16 17:28:34: system error for gas purge fault Message-ID: I needed more information when (during dep., after, etc.). Re-booting was the only way to recover. Thanks From jperez at snf.stanford.edu Tue Oct 21 14:31:18 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 21 Oct 2008 14:31:18 -0700 Subject: Problem sts SNF 2008-10-21 14:31:11: After clean chamber is still peeling (flakes) Message-ID: System will need two etchback3. Starting the first one at 2:30 PM and the next one should be started at ~5 PM. Please indicate this on our log sheet. Thanks! From jperez at snf.stanford.edu Fri Oct 24 07:09:43 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 24 Oct 2008 07:09:43 -0700 Subject: Problem sts SNF 2008-10-21 14:31:11: After clean chamber is still peeling (flakes) Message-ID: These two cleans seem to do the job. After 4.2 um of deposition. System wasn't flaking. Thanks,