Problem sts SNF 2008-10-02 14:22:17: New pump installed

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Oct 3 14:45:31 PDT 2008


Ran a nitride test after pump change. Dep. rate 95.5A/min and 
95A/ min. Index of refraction 1.97 & 1.96. % range across
the wafer was 5.5% & 4.6% (2 t.w.s).  Saw no changes in
parameters during deposition.




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