Problem sts SNF 2008-10-03 14:47:31: Switched 2% silane bottle, from B to A

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Oct 3 14:50:47 PDT 2008


Ran a oxide test run. Avg. thickness 1858, dep. rate 377A/min.
% range across the wafer was 1.76% Refractive index 1.473
PECVD is up, 




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