Problem sts SNF 2008-10-21 14:31:11: After clean chamber is still peeling (flakes)

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Oct 21 14:31:18 PDT 2008


System will need two etchback3. Starting the first one at 
2:30 PM and the next one should be started at ~5 PM.
Please indicate this on our log sheet.
Thanks!




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