Problem sts SNF 2008-10-21 14:31:11: After clean chamber is still peeling (flakes)

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Oct 24 07:09:43 PDT 2008


These two cleans seem to do the job. After 4.2 um of 
deposition. System wasn't flaking. Thanks,




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