From xhlim at snf.stanford.edu Mon Sep 8 11:32:38 2008 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Mon, 8 Sep 2008 11:32:38 -0700 Subject: Problem sts SNF 2008-09-08 11:32:37: System Error at end of deposition Message-ID: "Purge Gas Flow Fault" message on-screen. From jhaydon at snf.stanford.edu Thu Sep 11 08:03:25 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 11 Sep 2008 08:03:25 -0700 Subject: Shutdown sts SNF 2008-09-11 08:03:25: circuit breaker replacement Message-ID: From maurice at snf.stanford.edu Thu Sep 11 13:32:29 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Sep 2008 13:32:29 -0700 Subject: Shutdown sts SNF 2008-09-11 08:03:25: circuit breaker replacement Message-ID: power back on From rcordova at snf.stanford.edu Thu Sep 18 12:42:23 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 18 Sep 2008 12:42:23 -0700 Subject: Comment sts SNF 2008-09-18 12:42:20: Down for Clean, Message-ID: Started at 12:41pm From jperez at snf.stanford.edu Fri Sep 19 09:16:30 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Sep 2008 09:16:30 -0700 Subject: Comment sts SNF 2008-09-18 12:42:20: Down for Clean, Message-ID: Clean completed From jhaydon at snf.stanford.edu Mon Sep 22 16:03:44 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 22 Sep 2008 16:03:44 -0700 Subject: Comment sts SNF 2008-09-22 16:03:44: sts will be down for water line replacement about two hours Message-ID: From jhaydon at snf.stanford.edu Tue Sep 23 07:10:08 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 23 Sep 2008 07:10:08 -0700 Subject: Shutdown sts SNF 2008-09-23 07:10:07: water line replacement Message-ID: From jhaydon at snf.stanford.edu Tue Sep 23 08:56:23 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 23 Sep 2008 08:56:23 -0700 Subject: Shutdown sts SNF 2008-09-23 07:10:07: water line replacement Message-ID: water line replaced From jhaydon at snf.stanford.edu Tue Sep 23 08:56:53 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 23 Sep 2008 08:56:53 -0700 Subject: Comment sts SNF 2008-09-22 16:03:44: sts will be down for water line replacement about two hours Message-ID: From jhaydon at snf.stanford.edu Thu Sep 25 15:11:56 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 25 Sep 2008 15:11:56 -0700 Subject: Comment sts SNF 2008-09-25 15:11:55: newpump installaion Thursday Oct 12 Message-ID: could take more than a day From jhaydon at snf.stanford.edu Fri Sep 26 07:36:02 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 26 Sep 2008 07:36:02 -0700 Subject: Comment sts SNF 2008-09-25 15:11:55: newpump installaion Thursday Oct 12 Message-ID: From jhaydon at snf.stanford.edu Fri Sep 26 07:36:46 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 26 Sep 2008 07:36:46 -0700 Subject: Comment sts SNF 2008-09-26 07:36:46: new pump installation Thursday Oct 2 Message-ID: From dgrbovic at snf.stanford.edu Fri Sep 26 13:14:34 2008 From: dgrbovic at snf.stanford.edu (dgrbovic at snf.stanford.edu) Date: Fri, 26 Sep 2008 13:14:34 -0700 Subject: Problem sts SNF 2008-09-26 13:14:33: Pressure tolerance error appears Message-ID: From jperez at snf.stanford.edu Fri Sep 26 14:19:52 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:19:52 -0700 Subject: Problem sts SNF 2008-09-26 13:14:33: Pressure tolerance error appears Message-ID: O-ring cleaned and restarted etchback 3. No problem seen with Pressure tolerance error. From pnataraj at snf.stanford.edu Sun Sep 28 16:24:56 2008 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 28 Sep 2008 16:24:56 -0700 Subject: Problem sts SNF 2008-09-28 16:24:56: purge and pump problem Message-ID: The sytem won't purge very well and takes long to pump! May purge valves are sticking? From jperez at snf.stanford.edu Tue Sep 30 07:04:01 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 30 Sep 2008 07:04:01 -0700 Subject: Problem sts SNF 2008-09-28 16:24:56: purge and pump problem Message-ID: I tried the purging and pumping of the system yesterday and will operate it today. All I can say at this time is patience. I noticed that the gas purge process was aborted. This is a no no. From jperez at snf.stanford.edu Tue Sep 30 07:05:46 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 30 Sep 2008 07:05:46 -0700 Subject: Problem sts SNF 2008-09-08 11:32:37: System Error at end of deposition Message-ID: Have not seen this error since, but found the N2 flow setting high which would cause this error.