From chen0622 at snf.stanford.edu  Fri Apr 24 04:50:12 2009
From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu)
Date: Fri, 24 Apr 2009 04:50:12 -0700
Subject: Problem sts SNF 2009-04-24 04:50:12: many paticles around the side wall of chamber
Message-ID: <mailman.1086.1357938612.25857.sts-pcs@snf.stanford.edu>

Try to continue the cleaning cycle.  In the step of IPA wipe, found lots of white paticles on the side wall of chamber.  



From chen0622 at snf.stanford.edu  Fri Apr 24 05:20:22 2009
From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu)
Date: Fri, 24 Apr 2009 05:20:22 -0700
Subject: Problem sts SNF 2009-04-24 05:20:21: could not clean up all the whilte particles
Message-ID: <mailman.1087.1357938612.25857.sts-pcs@snf.stanford.edu>

could not wipe out all the white partilces.  Therefore did not continue the next step of cleaning cycles.