Problem sts SNF 2009-04-24 04:50:12: many paticles around the side wall of chamber

chen0622 at snf.stanford.edu chen0622 at snf.stanford.edu
Fri Apr 24 04:50:12 PDT 2009


Try to continue the cleaning cycle.  In the step of IPA wipe, found lots of white paticles on the side wall of chamber.  




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