From jperez at snf.stanford.edu Tue Dec 1 08:20:23 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Dec 2009 08:20:23 -0800 Subject: Comment sts SNF 2009-11-20 14:48:40: Start cycle clean at 2:45pm Message-ID: Thanks, clean cycle was completed. From ryhuang at snf.stanford.edu Tue Dec 8 20:57:07 2009 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Tue, 8 Dec 2009 20:57:07 -0800 Subject: Problem sts SNF 2009-12-08 20:57:06: 1st pumpdown failing... Message-ID: I wasn't able to deposit oxide on my wafers because the tool didn't pass the first pumpdown to 12mtorr. At standby purge, after a minute or so, I kept getting "pumpdown time exceeded". Looked like the chamber was only pumping down to ~40mtorr. Tried slow pump but the chamber pressure actually increased to ~190mtorr. Tried cleaning chamber lid O-ring and base with IPA, but still the same problem. From ryhuang at snf.stanford.edu Tue Dec 8 22:12:54 2009 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Tue, 8 Dec 2009 22:12:54 -0800 Subject: Comment sts SNF 2009-12-08 22:12:53: tool OK... Message-ID: Figured out the problem - the Ar switch had been turned up-side down. Things are running fine now! From jhaydon at snf.stanford.edu Fri Dec 11 07:37:47 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Dec 2009 07:37:47 -0800 Subject: Problem sts SNF 2009-12-08 20:57:06: 1st pumpdown failing... Message-ID: From jperez at snf.stanford.edu Fri Dec 11 14:07:10 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Dec 2009 14:07:10 -0800 Subject: Comment sts SNF 2009-12-08 22:12:53: tool OK... Message-ID: Argon switch was on and system won't vent. From mferrier at snf.stanford.edu Fri Dec 11 20:57:13 2009 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Fri, 11 Dec 2009 20:57:13 -0800 Subject: Problem sts SNF 2009-12-11 20:57:12: pb during cleaning Message-ID: Followed cleaning procedure after low T deposition Both oxpredep and odescum stopped before reaching 0. I was timing the process so I aborted after normal duration