From jperez at snf.stanford.edu Tue Feb 3 10:10:25 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Feb 2009 10:10:25 -0800 Subject: Comment sts SNF 2009-02-03 10:10:25: Dep rate on oxide test wafers after silane bottle change Message-ID: Low frequency oxide dep rate 357A / minute high frequency oxide dep rate 366 A / minute From raymondawu at snf.stanford.edu Sat Feb 7 19:11:30 2009 From: raymondawu at snf.stanford.edu (raymondawu at snf.stanford.edu) Date: Sat, 7 Feb 2009 19:11:30 -0800 Subject: Shutdown sts SNF 2009-02-07 19:11:29: Software Crashed Message-ID: From jhaydon at snf.stanford.edu Mon Feb 9 08:34:22 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 Feb 2009 08:34:22 -0800 Subject: Shutdown sts SNF 2009-02-07 19:11:29: Software Crashed Message-ID: two fans were not working lubricated fans will order new ones From vincentcyw at snf.stanford.edu Mon Feb 9 14:27:23 2009 From: vincentcyw at snf.stanford.edu (vincentcyw at snf.stanford.edu) Date: Mon, 9 Feb 2009 14:27:23 -0800 Subject: Comment sts SNF 2009-02-09 14:27:23: Leftover wafers in STS Message-ID: Found 4 wafers in the STS. Probably from the previous user that experienced the computer crash. I left the wafers in a wafer box right beside STS From raymondawu at snf.stanford.edu Mon Feb 16 15:02:28 2009 From: raymondawu at snf.stanford.edu (raymondawu at snf.stanford.edu) Date: Mon, 16 Feb 2009 15:02:28 -0800 Subject: Problem sts SNF 2009-02-16 15:02:28: Somtimes has problems pumping down to standby mode Message-ID: From jperez at snf.stanford.edu Tue Feb 17 07:13:34 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Feb 2009 07:13:34 -0800 Subject: Comment sts SNF 2009-02-09 14:27:23: Leftover wafers in STS Message-ID: Wafers picked up. From jperez at snf.stanford.edu Tue Feb 17 07:14:32 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Feb 2009 07:14:32 -0800 Subject: Comment sts SNF 2009-01-28 20:37:00: peeling Message-ID: Thanks for the information. From jperez at snf.stanford.edu Tue Feb 17 07:15:42 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Feb 2009 07:15:42 -0800 Subject: Comment sts SNF 2009-01-16 07:00:44: pumpdown slow Message-ID: Spoke with user, no need to change any part of the recipe. From mdickey at snf.stanford.edu Mon Feb 23 06:26:22 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 23 Feb 2009 06:26:22 -0800 Subject: Problem sts SNF 2009-02-23 06:26:21: Burnbox Message-ID: Burnbox has a no air failure, temp is at 500 From jperez at snf.stanford.edu Mon Feb 23 06:59:49 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Feb 2009 06:59:49 -0800 Subject: Problem sts SNF 2009-02-16 15:02:28: Somtimes has problems pumping down to standby mode Message-ID: Used STS and pumped down several times without a problem. From jackson at snf.stanford.edu Mon Feb 23 10:10:51 2009 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Mon, 23 Feb 2009 10:10:51 -0800 Subject: Shutdown sts SNF 2009-02-23 10:10:51: burn box clean? Message-ID: From mdickey at snf.stanford.edu Wed Feb 25 11:08:06 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 25 Feb 2009 11:08:06 -0800 Subject: Shutdown sts SNF 2009-02-23 10:10:51: burn box clean? Message-ID: Burnbox is back up. Element and liner replaced. Have fun processing! From jhaydon at snf.stanford.edu Wed Feb 25 11:36:27 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 25 Feb 2009 11:36:27 -0800 Subject: Problem sts SNF 2009-02-23 06:26:21: Burnbox Message-ID: burn bos repaired tool can be used when temperature has been reached From dgrbovic at snf.stanford.edu Wed Feb 25 13:59:06 2009 From: dgrbovic at snf.stanford.edu (dgrbovic at snf.stanford.edu) Date: Wed, 25 Feb 2009 13:59:06 -0800 Subject: Problem sts SNF 2009-02-25 13:59:05: non-teflon tweezers missing Message-ID: none of the two tweezers are there From jperez at snf.stanford.edu Fri Feb 27 07:03:56 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Feb 2009 07:03:56 -0800 Subject: Problem sts SNF 2009-02-25 13:59:05: non-teflon tweezers missing Message-ID: Thanks to Mr Hoang gave us his metal tweezers to use. From druist at snf.stanford.edu Fri Feb 27 11:58:03 2009 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Fri, 27 Feb 2009 11:58:03 -0800 Subject: Shutdown sts SNF 2009-02-27 11:58:03: silane bottle change Message-ID: will be back up in afternoon From jperez at snf.stanford.edu Fri Feb 27 14:48:17 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Feb 2009 14:48:17 -0800 Subject: Shutdown sts SNF 2009-02-27 11:58:03: silane bottle change Message-ID: Bottle change and test done. Dep. rate has dropped with low frequency recipe to 323 A and 326 A from 357A. OK to use, adjust your recipes or / and run a test. From jperez at snf.stanford.edu Fri Feb 27 14:49:13 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Feb 2009 14:49:13 -0800 Subject: Comment sts SNF 2009-02-03 10:10:25: Dep rate on oxide test wafers after silane bottle change Message-ID: New test done after 2% silane bottle change. From jperez at snf.stanford.edu Fri Feb 27 14:51:20 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Feb 2009 14:51:20 -0800 Subject: Comment sts SNF 2009-02-27 14:51:19: After 2% silane bottle change test results on LF recipe Message-ID: Two test wafers ran; 323 A / min and 327 A/ min.