February 2009 Archives by date

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Starting: Tue Feb 3 10:10:25 PST 2009
Ending: Fri Feb 27 14:51:20 PST 2009
Messages: 19

• Comment sts SNF 2009-02-03 10:10:25: Dep rate on oxide test wafers after silane bottle change   jperez at snf.stanford.edu
• Shutdown sts SNF 2009-02-07 19:11:29: Software Crashed   raymondawu at snf.stanford.edu
• Shutdown sts SNF 2009-02-07 19:11:29: Software Crashed   jhaydon at snf.stanford.edu
• Comment sts SNF 2009-02-09 14:27:23: Leftover wafers in STS   vincentcyw at snf.stanford.edu
• Problem sts SNF 2009-02-16 15:02:28: Somtimes has problems pumping down to standby mode   raymondawu at snf.stanford.edu
• Comment sts SNF 2009-02-09 14:27:23: Leftover wafers in STS   jperez at snf.stanford.edu
• Comment sts SNF 2009-01-28 20:37:00: peeling   jperez at snf.stanford.edu
• Comment sts SNF 2009-01-16 07:00:44: pumpdown slow   jperez at snf.stanford.edu
• Problem sts SNF 2009-02-23 06:26:21: Burnbox   mdickey at snf.stanford.edu
• Problem sts SNF 2009-02-16 15:02:28: Somtimes has problems pumping down to standby mode   jperez at snf.stanford.edu
• Shutdown sts SNF 2009-02-23 10:10:51: burn box clean?   jackson at snf.stanford.edu
• Shutdown sts SNF 2009-02-23 10:10:51: burn box clean?   mdickey at snf.stanford.edu
• Problem sts SNF 2009-02-23 06:26:21: Burnbox   jhaydon at snf.stanford.edu
• Problem sts SNF 2009-02-25 13:59:05: non-teflon tweezers missing   dgrbovic at snf.stanford.edu
• Problem sts SNF 2009-02-25 13:59:05: non-teflon tweezers missing   jperez at snf.stanford.edu
• Shutdown sts SNF 2009-02-27 11:58:03: silane bottle change   druist at snf.stanford.edu
• Shutdown sts SNF 2009-02-27 11:58:03: silane bottle change   jperez at snf.stanford.edu
• Comment sts SNF 2009-02-03 10:10:25: Dep rate on oxide test wafers after silane bottle change   jperez at snf.stanford.edu
• Comment sts SNF 2009-02-27 14:51:19: After 2% silane bottle change test results on LF recipe   jperez at snf.stanford.edu

Last message date: Fri Feb 27 14:51:20 PST 2009
Archived on: Fri Jan 11 13:10:28 PST 2013

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