From jperez at snf.stanford.edu Tue Jan 6 12:00:38 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 6 Jan 2009 12:00:38 -0800 Subject: Problem sts SNF 2009-01-06 12:00:38: OK to use, test wfrs need to be measured. Message-ID: From jperez at snf.stanford.edu Tue Jan 6 16:04:25 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 6 Jan 2009 16:04:25 -0800 Subject: Problem sts SNF 2009-01-06 12:00:38: OK to use, test wfrs need to be measured. Message-ID: Nitride tw's (4) Avg. dep rate 99 A, 100 A, 100 A 99 A / min HF oxide (4) tws. Avg dep rate 368A, 364A, 368A, 372A /min LF oxide (4) tws. Avg dep rate 368A, 364A, 347A, 355A /min. System is up From ehe at snf.stanford.edu Fri Jan 16 07:00:44 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 16 Jan 2009 07:00:44 -0800 Subject: Comment sts SNF 2009-01-16 07:00:44: pumpdown slow Message-ID: got pumpdown time exceeded msg a few times in a row (not due to argon toggle) -edited pumpdown time from 30s to 1min and that enabled system to pumpdown and move on to next step From shott at snf.stanford.edu Tue Jan 20 07:48:38 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:48:38 -0800 Subject: Comment sts SNF 2008-08-05 16:24:24: STS new dep rate Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:48:43 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:48:43 -0800 Subject: Comment sts SNF 2008-08-21 14:59:38: STS wet etch rates Message-ID: To the archives ... From seymour at snf.stanford.edu Tue Jan 20 13:26:56 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 20 Jan 2009 13:26:56 -0800 Subject: Problem sts SNF 2009-01-20 13:26:55: Gas switch over Message-ID: Need to switch over the 2% Silane/N2 from bottle B to bottle A From jhaydon at snf.stanford.edu Thu Jan 22 13:43:37 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 22 Jan 2009 13:43:37 -0800 Subject: Problem sts SNF 2009-01-20 13:26:55: Gas switch over Message-ID: bottle has been switched From ehe at snf.stanford.edu Wed Jan 28 20:37:01 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 28 Jan 2009 20:37:01 -0800 Subject: Comment sts SNF 2009-01-28 20:37:00: peeling Message-ID: Found material peeling off window. Previous user deposited 3um and did not measured dep thickness - guessing the total thickness was greater than the reported 4.1. Please measure dep. thickness (use dummy wafer if needed) for thick deps when chamber is getting close to 4.5um limit... From slcheng at snf.stanford.edu Thu Jan 29 00:27:00 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Thu, 29 Jan 2009 00:27:00 -0800 Subject: Problem sts SNF 2009-01-29 00:27:00: low CF4 Message-ID: its flow rate was droping during the cleaning process. i then aborted the process. Thus, the first step clean need to be done again. From jperez at snf.stanford.edu Thu Jan 29 09:02:29 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Jan 2009 09:02:29 -0800 Subject: Shutdown sts SNF 2009-01-29 09:02:28: CF4 has a leaky regulator , down until fixed. Message-ID: From jperez at snf.stanford.edu Thu Jan 29 10:14:28 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Jan 2009 10:14:28 -0800 Subject: Shutdown sts SNF 2009-01-29 09:02:28: CF4 has a leaky regulator , down until fixed. Message-ID: Re-started Etch back 3 again! OK to continue with the clean cycle. CF4 gas flow stable after watching for 5 minutes. From jperez at snf.stanford.edu Thu Jan 29 10:15:03 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Jan 2009 10:15:03 -0800 Subject: Problem sts SNF 2009-01-29 00:27:00: low CF4 Message-ID: CF4 gas flow stable.