Problem sts SNF 2009-01-06 12:00:38: OK to use, test wfrs need to be measured.

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Jan 6 16:04:25 PST 2009


Nitride tw's (4) Avg. dep rate 99 A, 100 A, 100 A 99 A / min
HF oxide (4) tws. Avg dep rate 368A, 364A, 368A, 372A /min
LF oxide (4) tws. Avg dep rate 368A, 364A, 347A, 355A /min.
System is up




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