Problem sts SNF 2009-01-20 13:26:55: Gas switch over
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Tue Jan 20 13:26:56 PST 2009
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Comment sts SNF 2008-08-21 14:59:38: STS wet etch rates
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Problem sts SNF 2009-01-20 13:26:55: Gas switch over
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Need to switch over the 2% Silane/N2 from bottle B to bottle A
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Comment sts SNF 2008-08-21 14:59:38: STS wet etch rates
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Problem sts SNF 2009-01-20 13:26:55: Gas switch over
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