Comment sts SNF 2009-01-28 20:37:00: peeling

ehe at snf.stanford.edu ehe at snf.stanford.edu
Wed Jan 28 20:37:01 PST 2009


Found material peeling off window. Previous user deposited 3um and did not measured dep thickness - guessing the total thickness was greater than the reported 4.1. Please measure dep. thickness (use dummy wafer if needed) for thick deps when chamber is getting close to 4.5um limit...




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