Shutdown sts SNF 2009-01-29 09:02:28: CF4 has a leaky regulator , down until fixed.

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jan 29 10:14:28 PST 2009


Re-started Etch back 3 again! OK to continue with the 
clean cycle. CF4 gas flow stable after watching for 5 minutes.




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