January 2009 Archives by author

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Starting: Tue Jan 6 12:00:38 PST 2009
Ending: Thu Jan 29 10:15:03 PST 2009
Messages: 12

• Comment sts SNF 2009-01-16 07:00:44: pumpdown slow   ehe at snf.stanford.edu
• Comment sts SNF 2009-01-28 20:37:00: peeling   ehe at snf.stanford.edu
• Problem sts SNF 2009-01-20 13:26:55: Gas switch over   jhaydon at snf.stanford.edu
• Problem sts SNF 2009-01-06 12:00:38: OK to use, test wfrs need to be measured.   jperez at snf.stanford.edu
• Problem sts SNF 2009-01-06 12:00:38: OK to use, test wfrs need to be measured.   jperez at snf.stanford.edu
• Shutdown sts SNF 2009-01-29 09:02:28: CF4 has a leaky regulator , down until fixed.   jperez at snf.stanford.edu
• Shutdown sts SNF 2009-01-29 09:02:28: CF4 has a leaky regulator , down until fixed.   jperez at snf.stanford.edu
• Problem sts SNF 2009-01-29 00:27:00: low CF4   jperez at snf.stanford.edu
• Problem sts SNF 2009-01-20 13:26:55: Gas switch over   seymour at snf.stanford.edu
• Comment sts SNF 2008-08-05 16:24:24: STS new dep rate   shott at snf.stanford.edu
• Comment sts SNF 2008-08-21 14:59:38: STS wet etch rates   shott at snf.stanford.edu
• Problem sts SNF 2009-01-29 00:27:00: low CF4   slcheng at snf.stanford.edu

Last message date: Thu Jan 29 10:15:03 PST 2009
Archived on: Fri Jan 11 13:10:28 PST 2013

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