From mtang at snf.stanford.edu  Wed Jul  1 14:47:37 2009
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Wed, 1 Jul 2009 14:47:37 -0700
Subject: Shutdown sts SNF 2009-07-01 14:47:36: NH3 bottle change
Message-ID: <mailman.1130.1357938612.25857.sts-pcs@snf.stanford.edu>




From mtang at snf.stanford.edu  Wed Jul  1 17:01:01 2009
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Wed, 1 Jul 2009 17:01:01 -0700
Subject: Problem sts SNF 2009-07-01 17:01:00: NH3 use
Message-ID: <mailman.1131.1357938612.25857.sts-pcs@snf.stanford.edu>

We are getting low on NH3 on this system.  A new bottle is on order.  You should watch your NH3 flows, just in case.



From eenriquez at snf.stanford.edu  Wed Jul  1 17:49:54 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 1 Jul 2009 17:49:54 -0700
Subject: Shutdown sts SNF 2009-07-01 14:47:36: NH3 bottle change
Message-ID: <mailman.1132.1357938612.25857.sts-pcs@snf.stanford.edu>

Installed NH3 cylinder from AG4100



From jperez at snf.stanford.edu  Wed Jul  8 07:10:37 2009
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Wed, 8 Jul 2009 07:10:37 -0700
Subject: Problem sts SNF 2009-07-01 17:01:00: NH3 use
Message-ID: <mailman.1133.1357938612.25857.sts-pcs@snf.stanford.edu>

NH3 bottle has been changed.



From khoang at snf.stanford.edu  Tue Jul 28 08:09:55 2009
From: khoang at snf.stanford.edu (khoang at snf.stanford.edu)
Date: Tue, 28 Jul 2009 08:09:55 -0700
Subject: Comment sts SNF 2009-07-28 08:09:55: SiO2 coating delaminated
Message-ID: <mailman.1134.1357938612.25857.sts-pcs@snf.stanford.edu>

The SiO2 coating on the chamber is delaminated.  
The chamber was supposed to be cleaned after low temp recipe depo.



From sishikaw at snf.stanford.edu  Wed Jul 29 12:09:48 2009
From: sishikaw at snf.stanford.edu (sishikaw at snf.stanford.edu)
Date: Wed, 29 Jul 2009 12:09:48 -0700
Subject: Problem sts SNF 2009-07-29 12:09:47: Red monitor
Message-ID: <mailman.1135.1357938612.25857.sts-pcs@snf.stanford.edu>

Monitor became suddenlly red.



From emyers at snf.stanford.edu  Wed Jul 29 12:34:20 2009
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 29 Jul 2009 12:34:20 -0700
Subject: Problem sts SNF 2009-07-29 12:09:47: Red monitor
Message-ID: <mailman.1136.1357938612.25857.sts-pcs@snf.stanford.edu>

Monitor was at C prompt.  Logged back in to the operating software and seems to be working now.



From faridz at snf.stanford.edu  Wed Jul 29 13:48:50 2009
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Wed, 29 Jul 2009 13:48:50 -0700
Subject: Comment sts SNF 2009-07-29 13:48:49: dirt chamber
Message-ID: <mailman.1137.1357938612.25857.sts-pcs@snf.stanford.edu>

previous user did not clean inside chamber its look very dirty, lots of
built up.