Comment sts SNF 2009-07-28 08:09:55: SiO2 coating delaminated

khoang at snf.stanford.edu khoang at snf.stanford.edu
Tue Jul 28 08:09:55 PDT 2009


The SiO2 coating on the chamber is delaminated.  
The chamber was supposed to be cleaned after low temp recipe depo.




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