Comment sts SNF 2009-05-31 20:45:25: leak problem is fixed
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Tue Jun 2 07:09:54 PDT 2009
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Comment sts SNF 2009-05-08 13:45:00: changed to bottle B should do test run before running wafers
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Comment sts SNF 2009-06-08 11:34:12: Nitride test and LF oxide test were lower
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Not sure how the leak (if it was a leak) got fixed.
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Comment sts SNF 2009-05-08 13:45:00: changed to bottle B should do test run before running wafers
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Comment sts SNF 2009-06-08 11:34:12: Nitride test and LF oxide test were lower
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