Comment sts SNF 2009-06-08 11:34:12: Nitride test and LF oxide test were lower

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Jun 8 11:34:13 PDT 2009


Four test wafers and average was just about the same
Front TW Avg. 928A , dep rate 91A/min.
Back TW  Avg. 923 A, dep rate 90.6 A/min.
Right TW Avg. 930A, dep rate 91A/min.
Left   TW Avg. 925A, dep rate 90.7 A/min.




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