Problem sts SNF 2009-06-19 17:26:30: gasline purge

ehe at snf.stanford.edu ehe at snf.stanford.edu
Fri Jun 19 17:26:30 PDT 2009


Taking infinite amount of time - has to be aborted after >10mins after oxide deposition ends. One symptom after deposition is that the silane stays at 26-30sccm during entire length of gasline purge (it's not getting purged), as far as I remember it usually goes to 0 at which point the cycle can move on to purging the next line or repeating the purge process.




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