Shutdown sts SNF 2009-06-22 16:47:55: Shutdown per Jim Hayden

king at snf.stanford.edu king at snf.stanford.edu
Mon Jun 22 16:47:55 PDT 2009


The SiH4/N2 may be leaking somewhere in the system.   The chamber was cleaned by Chen; ready for IPA wipe next. 




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