Problem sts SNF 2009-06-24 06:15:56: silane tolerance error
dgunning at snf.stanford.edu
dgunning at snf.stanford.edu
Wed Jun 24 06:15:56 PDT 2009
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Problem sts SNF 2009-06-23 07:37:59: Flow meter on order for valve sticking
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Problem sts SNF 2009-06-24 06:15:56: silane tolerance error
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had to abort deposition - wouldn't resume.
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Problem sts SNF 2009-06-23 07:37:59: Flow meter on order for valve sticking
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Problem sts SNF 2009-06-24 06:15:56: silane tolerance error
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