From xhlim at snf.stanford.edu Wed Mar 4 20:56:06 2009 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Wed, 4 Mar 2009 20:56:06 -0800 Subject: Problem sts SNF 2009-03-04 20:56:05: Pumpdown time exceeded error Message-ID: In the middle of the clean cycle, after completing the first 3 steps, I kept getting the error Pumpdown time exceeded. I aborted and retried more than 4 times and also waited a long time, but system did not allow me to go further than "Purge". I left it in that state for 15-20 minutes, but it just stayed that way always. I can't proceed to the next deposition step. From ehe at snf.stanford.edu Thu Mar 5 15:14:29 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 5 Mar 2009 15:14:29 -0800 Subject: Problem sts SNF 2009-03-05 15:14:29: high reflected power Message-ID: Twice today, and four times in the last 3 weeks, reflected power is higher than forward power and cuts deposition rate in half. The occurance is unpredictable. I can do a normal run with 0 reflected power and normal deposition rate, but right after that, get a bad run, followed by a normal run. People need to watch the reflected power in the log to document problem better. From emyers at snf.stanford.edu Fri Mar 6 16:42:58 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 6 Mar 2009 16:42:58 -0800 Subject: Problem sts SNF 2009-03-06 16:42:57: Needs Help Message-ID: Head is not centered when lowered. Another piece fell out, this time it's a metal washer. From ehe at snf.stanford.edu Fri Mar 6 20:15:37 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 6 Mar 2009 20:15:37 -0800 Subject: Comment sts SNF 2009-03-06 20:15:37: uniformity worsened Message-ID: Since Thurs. Mar.5 uniformity is a bit worse than usual, thickness difference of 5% between center/edge of chamber (faster dep. in center) From ehe at snf.stanford.edu Sun Mar 8 17:19:09 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 8 Mar 2009 17:19:09 -0700 Subject: Comment sts SNF 2009-03-08 17:19:09: one pair metal tweezers broken Message-ID: Found one of the metal tweezers broken, need a replacement for the flat-edge tweezer From jhaydon at snf.stanford.edu Mon Mar 9 07:07:34 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 9 Mar 2009 07:07:34 -0700 Subject: Shutdown sts SNF 2009-03-09 07:07:34: looking into debries falling off of shower head Message-ID: From jperez at snf.stanford.edu Tue Mar 10 08:15:00 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Mar 2009 08:15:00 -0700 Subject: Comment sts SNF 2009-03-08 17:19:09: one pair metal tweezers broken Message-ID: Cleaned and replaced broken tweezer. From jperez at snf.stanford.edu Tue Mar 10 08:16:13 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Mar 2009 08:16:13 -0700 Subject: Problem sts SNF 2009-03-06 16:42:57: Needs Help Message-ID: Jim replaced screw and washer and re-aligned shower head. From jperez at snf.stanford.edu Tue Mar 10 13:48:32 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Mar 2009 13:48:32 -0700 Subject: Shutdown sts SNF 2009-03-09 07:07:34: looking into debries falling off of shower head Message-ID: Jim Haydon remove debris and repleaced plate and shower head back together. Four wafers were tested on low frequency (oxide) and four wafers ran with nitride test during one pass. Tests result were good. From jperez at snf.stanford.edu Tue Mar 10 13:58:18 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Mar 2009 13:58:18 -0700 Subject: Comment sts SNF 2009-03-06 20:15:37: uniformity worsened Message-ID: Uniformity was good per wafer (4). Ran oxide low frequency test on four wafers and dep. rate was 401 angstroms per minute, 402 A, 404A, 405A. Nitride test was 101A, 102A, 104A 102A. From jperez at snf.stanford.edu Tue Mar 10 14:05:41 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Mar 2009 14:05:41 -0700 Subject: Problem sts SNF 2009-03-05 15:14:29: high reflected power Message-ID: Ran two tests, one oxide test with low frequency and one nitride test that uses both low and high frequence and saw NO reflective problems. From jperez at snf.stanford.edu Tue Mar 10 14:07:17 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Mar 2009 14:07:17 -0700 Subject: Problem sts SNF 2009-03-04 20:56:05: Pumpdown time exceeded error Message-ID: The only time I see this error is when the argon toggle is in the up position (argon flowing). When venting make sure toggle is all the way down. From jperez at snf.stanford.edu Tue Mar 10 14:08:51 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Mar 2009 14:08:51 -0700 Subject: Comment sts SNF 2009-02-27 14:51:19: After 2% silane bottle change test results on LF recipe Message-ID: New test results after maintenance worked on showerhead. From jperez at snf.stanford.edu Tue Mar 10 14:12:24 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Mar 2009 14:12:24 -0700 Subject: Comment sts SNF 2009-03-10 14:12:23: Ran two different test, 4 wfrs per pass Message-ID: Ran Low Frequency and test results are in STS log book. Oxide Dep rate on four test wafers; 401, 404, 405, 411 angstroms per min. Nitride dep. rate on four test wafers. 101, 102, 104, 102 angstroms per min. From mdickey at snf.stanford.edu Fri Mar 13 09:48:04 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 13 Mar 2009 09:48:04 -0700 Subject: Problem sts SNF 2009-03-13 09:48:04: No N2O Message-ID: Nitrous Oxide bottle is going to be changed. Will not be available for a few hours From mdickey at snf.stanford.edu Fri Mar 13 10:57:30 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 13 Mar 2009 10:57:30 -0700 Subject: Shutdown sts SNF 2009-03-13 10:57:29: Bottle change Message-ID: Down for N2O bottle change From jperez at snf.stanford.edu Fri Mar 13 15:08:29 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Mar 2009 15:08:29 -0700 Subject: Shutdown sts SNF 2009-03-13 10:57:29: Bottle change Message-ID: 3/13/09 Nitrus Oxide bottle change and leak check has been completed. Running a High Frequency test because it was the last test done that came out excellent on Thursday of this week 3/12/09 (yesterday). From jperez at snf.stanford.edu Fri Mar 13 15:09:39 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Mar 2009 15:09:39 -0700 Subject: Problem sts SNF 2009-03-13 09:48:04: No N2O Message-ID: Nitrus Oxide bottle change and leak check completed. From jperez at snf.stanford.edu Fri Mar 13 15:48:27 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Mar 2009 15:48:27 -0700 Subject: Comment sts SNF 2009-03-13 15:48:26: After Nitrus Oxide bottle change Test results the same as yesterday - Great! Message-ID: 1test wafers ran using Std high frequency ( comparing yesterday's test were very closer. Dep rate 377A/min <1% change across the wafer. Index 1.466