Problem sts SNF 2009-03-04 20:56:05: Pumpdown time exceeded error

[xhlim at snf.stanford.edu]

In the middle of the clean cycle, after completing the first 3 steps, I kept getting the error Pumpdown time exceeded.
I aborted and retried more than 4 times and also waited a long time, but system did not allow me to go further than "Purge". I left it in that state for 15-20 minutes, but it just stayed that way always. I can't proceed to the next deposition step.