Comment sts SNF 2009-03-06 20:15:37: uniformity worsened

ehe at snf.stanford.edu ehe at snf.stanford.edu
Fri Mar 6 20:15:37 PST 2009

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Since Thurs. Mar.5 uniformity is a bit worse than usual, thickness difference of 5% between center/edge of chamber (faster dep. in center)

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