Comment sts SNF 2009-03-06 20:15:37: uniformity worsened

ehe at snf.stanford.edu ehe at snf.stanford.edu
Fri Mar 6 20:15:37 PST 2009


Since Thurs. Mar.5 uniformity is a bit worse than usual, thickness difference of 5% between center/edge of chamber (faster dep. in center)




More information about the sts-pcs mailing list