Shutdown sts SNF 2009-03-09 07:07:34: looking into debries falling off of shower head

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Mar 10 13:48:32 PDT 2009


Jim Haydon remove debris and repleaced plate and 
shower head back together. Four wafers were tested on low 
frequency (oxide)  and four wafers ran with nitride test during 
one pass. Tests result were good.




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