Comment sts SNF 2009-03-10 14:12:23: Ran two different test, 4 wfrs per pass

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Mar 10 14:12:24 PDT 2009


Ran Low Frequency and test results are in STS log book.
Oxide Dep rate on four test wafers; 401, 404, 405, 411 
angstroms per min.
Nitride dep. rate on four test wafers. 101, 102, 104, 102 
angstroms per min.




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