Comment sts SNF 2009-03-13 15:48:26: After Nitrus Oxide bottle change Test results the same as yesterday - Great!

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Mar 13 15:48:27 PDT 2009

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1test wafers ran using Std high frequency ( comparing 
yesterday's test were very closer.
Dep rate 377A/min <1% change across the wafer. Index
1.466

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