From jhaydon at snf.stanford.edu Thu May 7 09:07:18 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 7 May 2009 09:07:18 -0700 Subject: Problem sts SNF 2009-04-24 05:20:21: could not clean up all the whilte particles Message-ID: cleaning problem has not reoccured From jhaydon at snf.stanford.edu Thu May 7 09:08:45 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 7 May 2009 09:08:45 -0700 Subject: Problem sts SNF 2009-04-24 04:50:12: many paticles around the side wall of chamber Message-ID: particals have been cleaned up From jhaydon at snf.stanford.edu Fri May 8 13:45:01 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 8 May 2009 13:45:01 -0700 Subject: Comment sts SNF 2009-05-08 13:45:00: changed to bottle B should do test run before running wafers Message-ID: From haiwei at snf.stanford.edu Sat May 9 21:57:57 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sat, 9 May 2009 21:57:57 -0700 Subject: Problem sts SNF 2009-05-09 21:57:57: sts doesn't work Message-ID: can't pump down From haiwei at snf.stanford.edu Sat May 9 21:58:24 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sat, 9 May 2009 21:58:24 -0700 Subject: Problem sts SNF 2009-05-09 21:58:24: sample trapped in themachine Message-ID: From audet at snf.stanford.edu Sun May 10 12:45:48 2009 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Sun, 10 May 2009 12:45:48 -0700 Subject: Shutdown sts SNF 2009-05-10 12:45:47: machine not functional Message-ID: see previous user's comment From jhaydon at snf.stanford.edu Mon May 11 10:07:27 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 11 May 2009 10:07:27 -0700 Subject: Shutdown sts SNF 2009-05-10 12:45:47: machine not functional Message-ID: rebooted computer system was probably accidently turned off From jhaydon at snf.stanford.edu Mon May 11 10:08:19 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 11 May 2009 10:08:19 -0700 Subject: Problem sts SNF 2009-05-09 21:57:57: sts doesn't work Message-ID: system was probably accidently turned off From jhaydon at snf.stanford.edu Mon May 11 10:10:31 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 11 May 2009 10:10:31 -0700 Subject: Problem sts SNF 2009-05-09 21:58:24: sample trapped in themachine Message-ID: system was probably accidently turned off. I rebooted the computer From khoang at snf.stanford.edu Tue May 12 18:32:20 2009 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Tue, 12 May 2009 18:32:20 -0700 Subject: Problem sts SNF 2009-05-12 18:32:19: Pressure tolerance error Message-ID: "Pressure tolerance error" during warmup step. Unable to proceed to dep step. From audet at snf.stanford.edu Fri May 15 16:34:58 2009 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Fri, 15 May 2009 16:34:58 -0700 Subject: Problem sts SNF 2009-05-15 16:34:58: pressure tolerance error during warmup step Message-ID: during warmup, pressure setting is 500 mT, but actual pressure doesn't get above 450. From jhaydon at snf.stanford.edu Tue May 19 07:43:38 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 19 May 2009 07:43:38 -0700 Subject: Comment sts SNF 2009-05-19 07:43:37: I think the problem is with the flow controller i will order replacement Message-ID: From jperez at snf.stanford.edu Tue May 19 09:20:40 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 09:20:40 -0700 Subject: Comment sts SNF 2009-03-13 15:48:26: After Nitrus Oxide bottle change Test results the same as yesterday - Great! Message-ID: Old test results, need to show new test result for 5/8 bottle change. From jperez at snf.stanford.edu Tue May 19 09:21:22 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 May 2009 09:21:22 -0700 Subject: Comment sts SNF 2009-03-10 14:12:23: Ran two different test, 4 wfrs per pass Message-ID: Old test result since new bottle change. From haiwei at snf.stanford.edu Sun May 31 17:24:03 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sun, 31 May 2009 17:24:03 -0700 Subject: Problem sts SNF 2009-05-31 17:24:03: can't pump down the chamber Message-ID: the min pressure of chamber is>28mTorr. From haiwei at snf.stanford.edu Sun May 31 20:45:26 2009 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sun, 31 May 2009 20:45:26 -0700 Subject: Comment sts SNF 2009-05-31 20:45:25: leak problem is fixed Message-ID: