Shutdown sts SNF 2009-11-03 15:38:43: RF 1Power tolerence error

faridz at snf.stanford.edu faridz at snf.stanford.edu
Tue Nov 3 15:38:43 PST 2009


above error apperars while i was running clean cycle O2 Descum recipe. tool stop cleaning i dont know for how long recipe ran. On the bottom menue it give to two option 1) Abort 2) Resume. I try resume sevral times but after few seconds above error re-appears. Per Ed Myers tool has to shutdown. 
 




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