Comment sts SNF 2009-09-18 17:01:14: STS-etch
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Thu Nov 5 08:56:29 PST 2009
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Shutdown sts SNF 2009-11-03 15:38:43: RF 1Power tolerence error
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Problem sts SNF 2009-11-06 14:47:23: 2% silane gas bottle change
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will test again today,.
Previous message:
Shutdown sts SNF 2009-11-03 15:38:43: RF 1Power tolerence error
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Problem sts SNF 2009-11-06 14:47:23: 2% silane gas bottle change
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