Problem sts SNF 2009-11-06 14:47:23: 2% silane gas bottle change

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Nov 6 14:55:15 PST 2009


Ran Nitride test after gas bottle change and here are the test 
results; Four test wafers ran in one load.
    avg.        std dev.             % range           IR
1) 992         18.9                    2.5                    1.97   back
2) 1048       24.9                    3.78                 1.97   front tw
3) 1017       23.4                    3.23                 1.97  left side tw
4) 1019       24.1                    3.1                    1.97 right side tw




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