Problem sts SNF 2009-11-12 20:41:55: same as before

ehe at snf.stanford.edu ehe at snf.stanford.edu
Thu Nov 12 20:41:56 PST 2009


Same problem persists as stated in previous recent notes that have all been magically cleared. 
Power/etc fluctuating more than normal for this equipment, oxide dep uniformity usually 2% from center to edge of platen, now 12%. 




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