Problem sts SNF 2009-11-12 20:41:55: same as before

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Nov 17 08:44:26 PST 2009


"ehe" has reported this several times in the past few weeks, but staff-run qual tests have not observed the same problems.  It may very well be that the qual tests do not test the same process and conditions.  Elizabeth:  Please provide some more detail about your process (process recipe, substrates, thickness, measurement).  It would be very helpful if you could meet up with Ed and Jeannie to review this information.  If anyone else has uniformity data to share, it would be appreciated.




More information about the sts-pcs mailing list