Problem sts SNF 2009-10-20 16:50:02: Sio2 thickness too high

faridz at snf.stanford.edu faridz at snf.stanford.edu
Tue Oct 20 16:50:02 PDT 2009


I ran 7 wafers 3 diffrent runs 3 wafers came out without any SiO2 thickness and other four measure SiO2 thickness too high.!!! 




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