Problem sts SNF 2009-10-21 11:31:31: needs tune-up

ehe at ehe at
Wed Oct 21 11:31:32 PDT 2009

something is out of whack, parameters fluctuate during deposition (more than usual) and thickness varies 10% from center to edge of platen and between runs; refl. power is nonzero, etc

More information about the sts-pcs mailing list