Problem sts SNF 2009-10-21 11:31:31: needs tune-up

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Oct 22 14:57:22 PDT 2009


I didn't see the problem today when I loaded 4 test wafers.  The only
problem was the power range during a six minute deposit was
38 to 41 watts.  Mostly 40/41 watts and occasionally drop to 38 W, but 
returned quickly to 40/41W.
Here are the four average measurements; 
                    front TW       top TW        left sideTW       right side TW   
thick avg.    2276A         2221A         2220A                  2164A
std dev        27.85          22.1             29.7                      27.6
% range     1.66             1.57              1.89                     2.14       
IR                 1.476           1.4756        forgot to log        1.475




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