Problem sts SNF 2009-10-20 16:50:02: Sio2 thickness too high
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Thu Oct 22 14:58:30 PDT 2009
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Problem sts SNF 2009-10-20 16:50:02: Sio2 thickness too high
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Comment sts SNF 2009-10-20 21:45:38: 10% thickness variation from center to edge
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I ran one pass, four wafers. All OK!
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Problem sts SNF 2009-10-20 16:50:02: Sio2 thickness too high
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Comment sts SNF 2009-10-20 21:45:38: 10% thickness variation from center to edge
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